Chalmers University of Technology (Chalmers), Sweden

Johan Liu



Chalmers University of Technology, located in Göteborg, Sweden, is a leading European university of technology. The Department of Microtechnology and Nanoscience - MC2 is doing research and education with focus on future electronics, photonics, bio- and nanosystems. MC2 houses a cleanroom for micro- and nanofabrication with the latest equipment. Our work is often done in close collaboration with Swedish and international partners within academy, industry and society. With a unique research competence we offer

education on undergraduate and graduate level and within our international masters programmes. The Electronics Materials and Packaging Group focuses on development of new materials and processes for electronics applications. The major focus of the research is towards development of nanomaterials based technology. This includes nano-thermal interface materials, nanocooling devices as well as nano lead free solders and adhesives for electronics cooling and interconnects applications. The final goal is to develop platforms for heterogeneous integration in future electronic systems.

The group has recently published a number of papers on the topic of CNT integration and interconnects in highimpact journals, such as Applied Physics Letters, Advanced Materials, Nanotechnology, Carbon, Small, and IEEE Electron Device Letters.

Role in NANO-RF:

  • Develop technologies for the fabrication and integration of CNT interconnects.


Laboratory resources:

MC2 at Chalmers houses the Nanofabrication Laboratory, a world-class university cleanroom for research and fabrication of micro and nanotechnology. The Laboratory is a state-of-the-art facility with 1240 m2 of cleanroom classified area with process and measurement tools providing a broad platform for the development and testing of new ideas in micro and nano technology. The Laboratory is also a member of μ- Fab, the Swedish micro and nano fabrication network supported by The Swedish research council, SSF, Vinnova and Knut and Alice Wallenberg Foundation. This gives access to a larger infrastructure through the Microstructure Laboratory at Uppsala University and the Electrum Laboratory at KTH in Stockholm. MC2’s two strategic focus areas have recently resulted in the launch of two processing lines in the Laboratory to complement the flexible processing and materials environment. The lines increase the quality, throughput,

and stability of the microwave & nano/quantum devices and components fabricated in the Laboratory. More than 200 processing and characterization tools are accessible in the laboratory, covering the fields such as electron beam lithography, thin film deposition, plasma processing, thermal processing, MBE of III-V materials, and advanced characterization. The equipments at the Bio-, Electronics Materials and Packaging Group include a complete surface mount line with a flip chip bonder and characterization tools, such as mechanical testers, TGA, DMA, DSC, thermal cycling chamber, etc. The group also owns a TCVD/PECVD CNT growth system installed in the nanofabrication lab.


Key personnel:

Prof. Johan Liu is the head of the Center for Swedish Microsystem Integration Technology and BioNano Systems Laboratory at the Department of Microtechnology and nanoscience, Chalmers University of Technology, Göteborg, Sweden. As a fellow of IEEE and member of the Swedish Royal Academy of Engineering Sciences (IVA) he has published over 370 papers in journals, proceedings and book chapters in the field of electronics packaging technology and materials. He has 30 patents accepted or filed and has given about 30 key note/invited talks during the last 20 years in the field of electronics packaging.


Dr. Murali Murugesan has completed Bachelor’s (1996) and Master’s (2001) degrees in Chemistry from Madurai Kamaraj University, Madurai, India. He received a Ph.D. degree in Chemistry from University of Mumbai, India in 2008. He worked on the development of polymer carbon nano tube nanocomposite during post doc research stay at University of Oklahoma, USA. Currently he is a post doc researcher at the Department of Microtechnology and Nanoscience.